Research on a seven-wafer Si-based combustor for micro power generation

The paper presents preliminary results of our ongoing research program aimed at developing a seven-wafer Si-based combustor for micro power generation. An iterative computing process is developed for both system and components design. Primary results on fabrication of the micro combustor are described. Sealing a Kovar tube to the Si structure of the micro combustor by Kovar-glass-Si bonding is discussed. Instrumentation for testing the combustor is established. A temperature of 955/spl deg/C near the exit of the combustor was observed.