Electrically tunable and switchable film bulk acoustic resonator

The paper describes an electrically tunable and switchable film bulk acoustic resonator (FBAR) that is formed by integrating an FBAR with an electrostatic MEMS actuator. Around /spl sim/0.8% tuning of the series resonant frequency (/spl Delta/f/spl cong/18 MHz) at 2.3 GHz is experimentally obtained with an electrostatic actuation voltage varying between 12.2 and 27.5 V. Also, a switchable resonator with Q (quality) factor of greater than 100 at 2.2 and 4.0 GHz is experimentally demonstrated in a compact device area.