Design of band-pass micromachined filters based on fixed-fixed beam resonators

Cascaded, two- and three-stages band-pass filters based on fixed-fixed beam micromechanical resonators have been designed for central frequencies F/sub 1/=10 MHz and F/sub 2/=20 MHz. Quality factors Q=500 have been predicted, under vacuum conditions, for a 3-dB bandwidth BW=0.2%. Insertion losses in the order of 1 to 2 dB have been evaluated.