Factory throughput improvements through intelligent integrated delivery in semiconductor fabrication facilities

"Integrated Delivery" is a system that integrates the automated material handling systems (AMHS) with process tools to automate the flow of material through a semiconductor fabrication facility (fab). It was developed to streamline operations in fully mechanized 300-mm wafer fabs by automating the delivery of lots to/from the tools, and automating all aspects of lot processing, with no manual intervention. Within this context, lot delivery performance is a critical factor impacting factory throughput. Poor material delivery performance translates into tools sitting idle waiting for lots to be delivered, which increases tool cycle time and decreases output. This work describes intelligent integrated delivery (IID) capabilities, including just-in-time proactive material movement and delivery prioritization, to reduce delivery time impacts. These capabilities significantly reduce the lot delivery queue time, and as a result, measurably improve factory throughput. The results have been demonstrated via theoretical modeling, as well through actual deployment in Intel's 300 mm fabs.