The future of silicon-on-insulator (SOI) technology in microelectronic systems

After many years of materials development and circuit research, silicon-on-insulator (SOI) technology clearly has become a viable approach for high performance microelectronics. As semiconductor technology continues to scale, the value of an SOI materials platform continues to expand. It has become a key technology to enable a new class of micro-scale functionality, through 3-D circuits and mixed technology integration.