Design and fabrication of electroabsorption modulators for data rates up to 100 Gb/s

We present segmented transmission-line (TML) electroabsorption modulators (EAM) matched to 50 /spl Omega/. The devices show excellent high frequency performance up to 50 GHz, and exhibit a maximum model-extrapolated 3 dBe bandwidth of 90 GHz. Design considerations and optimization techniques for periodic segmented TML-EAM are discussed. Also methods used for the device fabrication are presented.