Measurement technique of in-plane motion for MEMS based on blur image synthesis

Testing technique is more and more important in the industrialization of research and development of MEMS. Based on machine micro-vision dynamic testing system for MEMS is established. The technique of blur image synthesis is presented to extract and analyze in-plane motion characteristics of MEMS devices. Image processing method is used to carry out frequency sweep and voltage sweep measurements. The in-plane motion characteristics of MEMS are obtained and the testing results are analyzed and discussed. The resolution and repeatability of the method can obtain to 100 nm.