A micromachined 400 GHz rectangular waveguide and 3-pole bandpass filter on a silicon substrate

A micromachined 400 GHz waveguide and waveguide bandpass filter using a split block approach is presented. The waveguide and filter are fabricated using a deep RIE process on high resistivity silicon. Simulation results show an insertion loss for the filter of 0.65 dB with a 20 GHz bandwidth. The assembly of the split block using a fixture block is discussed in detail.