High-speed AMHS and its operation method for 300-mm QTAT fab

By using all-single-wafer processing in the 300-mm quick turn-around time production system, we have shortened cycle time to one-half or less than that of mixed-batch processing. We have also developed a high-speed automated material handling systems (AMHS) for achieving short cycle time. An intrabay rail-guided vehicle developed for the 300-mm fab is a component of this system. This paper describes the new system concepts, including AMHS hardware improvement, operation methods, and technician skill enhancement. We achieved a transfer time of one third or less that of previous fabs.