Monitor-photodiode integration in the amplifier- and modulator-integrated DFB laser diode

Monitor photodiode (MPD) is monolithically integrated in the antireflection output window region of the amplifier- and modulator-integrated laser diode. The MPD is electrically isolated from the other components by semi-insulating InP regrowth with total leakage current less than 1 μA. The MPD responsivity to the output power is tailored through its location and size, and about half decibel power loss is achieved for 4% responsivity. The reliability is demonstrated through the accelerated aging test.