Feasibility of a flip chip approach to integrate an IR filter and an IR detector in a future gas detection cell

In this work we have studied the feasibility of integrating an IR filter and IR detector by means of a flip chip technique. This filter and detector combination should be the heart of a future gas detection cell based on infrared absorption. In our case the filter is a surface micromachined Fabry-Perot interferometer, and the IR detector is a bulk micromachined thermopile.