Mixed system and component level T-CAD for micro fabrication

In this paper two T-CAD systems are presented, one dealing with the design of micro devices on the system level and allowing checking of process sequences using rules comprising expert knowledge. The other one is a work-flow-based system for the layout of micro components fabricated by wet chemical etching of silicon, thus providing a component level view to the design process. It is shown how both systems are integrated providing the designer with concurrent access to system and component design.