Chemical sensing systems using xerogel-based sensor elements and CMOS photodetectors

We present the first example of an integrated complementary metal-oxide-semiconductor (CMOS) photodetector coupled with a solid-state xerogel-based thin-film sensor to produce a compact chemical sensor system. We compare results using two different CMOS-based detector systems to results obtained by using a standard photomultiplier tube (PMT) or charge-coupled device (CCD) detector. Because the chemical sensor elements are governed by a Stern-Volmer relationship, the Stern-Volmer quenching constant is used as the primary comparator between the different detectors. All of the systems yielded Stern-Volmer constants from 0.042 to 0.049 O/sub 2/%/sup -1/. The results show that the CMOS detector system yields analytical data that are comparable to the CCD- and PMT-based systems. The disparity between the data obtained from each detector is primarily associated with the difference in how the signals are obtained by each detector as they presently exist. We have also observed satisfactory reversibility in the operation of the sensor system. The CMOS-based system exhibits a response time that is faster than the chemical sensor element's intrinsic response time, making the CMOS suitable for time-dependent measurements. The CMOS array detector also uses less than 0.1% the power in comparison to a standard PMT or CCD. The combined xerogel/CMOS system represents an important step toward the development of a portable, efficient sensor system.