The detection of DNA using a silicon nanopore

We have developed a novel strategy for producing nanopores in inorganic, CMOS-compatible membranes using a tightly focused, high energy electron beam. We are able to characterize the nanopores physically (TEM, AFM) as well as electrically (ionic conductivity and "wetting" curves). Subsequently, we used the nanopore as a molecular Coulter counter to detect the size of a DNA molecule. This is the first report of the use of an inorganic nanopore for discriminating DNA molecules.