Ultra low cost single-step fabrication of double-sided YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// films by the non-vacuum MOD method for microwave circuits

Low-cost, single-step fabrication of double-sided YBa/sub 2/CU/sub 3/O/sub 7-/spl delta// (YBCO) high-temperature superconducting (HTS) films on a [001]LaAlO/sub 3/ substrate for microwave applications are demonstrated by the metalorganic deposition (MOD) method, which is a liquid-phase non-vacuum fabrication process. High quality HTS films with the critical temperature (T/sub c/) of 90.4 K and the surface impedance R/sub s/ of less than 0.1 m/spl Omega/ at 42 K and 9.99 GHz is achieved. X-ray diffraction (XRD) pattern and scanning electron microscope (SEM) observation are also carried out and the epitaxial growth of c-axis oriented YBCO crystals is confirmed. The measured unloaded quality factor (Q/sub u/) of 2.68/spl times/10/sup 4/ is achieved for a half-wavelength microstrip resonator fabricated on the YBCO film at 30 K and 2.511 GHz.