Optical properties of PLZT thin films determined using reflection spectra

Optical properties of thin PLZT films of various stoichiometry are determined using reflectance spectra processing. The knowledge of optical properties of PLZT thin films is quite necessary for opto-electronic applications. Materials like PLZT are attractive for the application in integrated optics and for realization of various microelectronic and opto-electronic devices. Their optical properties are strongly dependent on deposition conditions and defects concentration. Thin PLZT films are prepared by pulsed laser deposition on sapphire substrates at different oxygen pressure. Film structure is investigated by WDX. Changes of film refractive index n(/spl lambda/), extinction k(/spl lambda/) with wavelength in the spectral region 0.3 1.1 /spl mu/m and film thickness d are determined as a result of films reflectance spectra modeling and fitting procedure using all points of the spectra.