Dosimetry in linac electron-beam environments (microelectronic packages)

The relationship between dose in TLDs and dose in packaged microelectronic devices as a function of electron beam energy is calculated using the CEPXS/ONELD radiation transport code. The effects of adjacent materials, including TLDs, upon the energy deposition in the device are also discussed. The calculations indicate that dosimetry errors for linac electron beam environments (electron energies >12 MeV) can be made less than 5% if appropriate materials and geometries are used. The CEPXS/ONELD code provides a powerful tool for dosimetry analysis in electron-beam environments.<
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