A 4-bit miniature X-band MEMS phase shifter using switched-LC networks

A compact 4-bit true-time-delay MEMS phase shifter fabricated on 8-mil GaAs substrate is described. Miniaturization of the phase shifter is achieved using phase shift networks based on semi-lumped LC circuits and a compact SP2T switch configuration. Trade-off in size and loss is performed to achieve a phase shifter with an area of 7 mm/sup 2/ and an average insertion loss of -1.47 dB at 9.4 GHz. The phase shifter has a measured return loss of < -10.5 dB over 8-12 GHz and an RMS phase error of 2/spl deg/ at 9.4 GHz.