In-plane resonant cavities in InP/GaInAsP/InP with photonic crystal boundaries

In-plane cavities with photonic crystal (PhC) boundaries were fabricated into an InP/GaInAsP/InP slab waveguide structure using Ar/Cl/sub 2/ based chemically assisted ion beam etching. The cavities are realized as segments of different lengths bounded by two V-shaped double or single mirrors in straight photonic crystal waveguides and were designed to have resonance in the 1.55 /spl mu/m wavelength range. The optical loss inside the PhC was determined by fitting the measured transmission spectra with two-dimensional finite-difference time-domain simulations. The best results were obtained for a 6.2 /spl mu/m long resonant cavity with double mirrors for which a quality factor of 460 was obtained. The results demonstrate significant improvements in the quality of PhC fabrication in this material system.