Relationship between orientation and ferroelectric properties in Ir/PZT/Ir epitaxial capacitors

Epitaxial Ir/PZT/Ir capacitors with varied compositions of Zr/Ti were investigated in terms of the relationship between the film orientation and ferroelectric properties. The epitaxial interface with iridium, whose lance constant is smaller than that of PZT, greatly influenced the orientation and the tetragonality of the PZT film.