Hybrid MEMS inductor for miniaturized autonomous power converter

We propose a hybrid technology to realize three-dimensional (3D) MEMS power inductors for use in a new type of miniaturized power converter. The inductors are composed of high-resolution coils made in a Cu/polyimide technology and miniature ferrite cores made by a powder blasting micro-erosion process. The converter transforms voltages as low as 0.4 V, originating from a single solar cell, to an output voltage in the range of 1-20 V and is located inside a tetrahedral-shaped parallel assembly of solar cells. Thereby, solar energy is transformed into exploitable electrical power for use in industrial or space applications, where ubiquitous and autonomous electrical energy is required.