A low loss MEMS transmission line with shielded ground

This paper reports a MEMS transmission line with shielded ground realized using fully CMOS compatible, monolithically integrable 3-D RF MEMS processes. The fabricated transmission line has achieved extremely low loss by shielding the signal line from lossy silicon substrate at the bottom as well as from radiation into open air space above. A low loss of 0.35 dB/cm at 25 GHz has been achieved in the fabricated transmission lines.