Linear piezoelectric step motors

The design of a linear step motor using piezoelectric material is presented. The principle of operation is based on the characteristics of piezoelectric ceramics, which have a relationship between pressure and voltage. This motor can achieve a very-high-precision positioning. The resolution can be as high as 0.1 mu m to 10 AA, depending on the operating voltages and the dimension of the piezoelectric ceramic for a specific application. Due to the slow response of the mechanical clutches, the system cannot be driven very fast. It takes 10/sup 4/ s to generate a 2.74 cm displacement.<
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