Sputtered Sulphide Films for Electronic Components

Two types of sputtering have been used to deposit several II-VI compound materials as thin films suitable for various applications. Both reactive and compound sputtering have yielded stable and reproducible films. In either case doping was accomplished during film deposition. Zinc sulphide films have yielded good capacitors with low dissipation, moderate breakdown voltages and High stability. Pronounced photoconductivity was exhibited by suitably doped cadmium sulphide and seienide Films. When provided with an appropriate counter electrode the sulphides of zinc and cadmium exhibited the photovoltaic effect or rectification. Doping during sputtering has also led to electroluminescence. Film resistivities as high as 10
¹²
ohm cm. have been achieved.