Dielectric breakdown due to hole avalanche in plasma polymer films

High-field conduction and dielectric breakdown characteristics of plasma-polymerized films of ethylene and trifluoromethane (PPEF) and those of ethylene (PPE) were studied. Based on experimental results on the prebreakdown current, time lag to breakdown, and thickness or electrode metal dependence on dielectric strength, it is shown that the breakdown is caused by hole avalanche and that scattering of holes by fluorine atoms results in higher dielectric strength in PPEF than in PPE.<
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