A novel deposit/spin waveguide interconnection (DSWI) for semiconductor integrated optics

We propose an efficient and simple optical interconnection between active semiconductor components by deposition and spin coating. Details of the waveguide design, the fabrication technique, and a promising material combination are given. Experimental results with an integrated laser-polyimide/SiO
x
(
x \sim 2
) waveguide combination demonstrate low-threshold (2.0 kA/cm
²
) laser operation and a low-loss waveguide interconnection (81 percent coupling efficiency) on a GaInAsP/InP chip.