"Millipede": a MEMS-based scanning-probe data-storage system

Ultrahigh storage densities of up to 1 Tbit/in./sup 2/ or more can be achieved by local-probe techniques to write, read back, and erase data in very thin polymer films. The thermomechanical scanning-probe-based data-storage concept called Millipede combines ultrahigh density, small form factor, and high data rate. After illustrating the principles of operation of the Millipede, we introduce system aspects related to the read-back process, multiplexing, and position-error-signal generation for tracking.