Impact of airborne molecular contamination to nano-device performance

In this paper, we detected most airborne molecular contamination (AMC) in our present cleanroom and in our specially equipped clean bench through air sampling and wafer sampling experiments. We then investigate the effects of AMC on device performance under different filter modules. We discovered that the NEUROFINE PTFE filter combined with the chemical filters has excellent controlling ability for metal, organic and inorganic contaminations. We believe that the novel filter combination can be used to further improve the device manufacturing environment when the device is continuously scaled down to nanometer generation.