Comparative study of electrostatically actuated torsion micromirrors: design parameters and performance

This paper will systematically compare the measured results of electrostatic torsion micromirrors with various design parameters, namely: the actuator shape, location of bottom electrode and aspect ratio of the suspending beam. The results of this study are instrumental for the design of torsion micromirrors with new efficient simulation methodology, achieving extended travel range and minimizing the applied voltage required for their operation.