State-of-the art in vertical furnaces

Batch furnaces would be by now replaced by the single wafer technology, this subject has been around in every generation change. The actual situation is quite different: batch furnaces are still holding a large market share, they still offer most cost effective solutions, they are competitive, innovative and backed up by investments in new developments. This paper will cover a selection of latest developments in diffusion/LPCVD processing that have enabled this to happen.