A modular structured, planar micro pump with no moving part (NMP) valve for fluid handling in microanalysis systems

In this article we describe a micro pump, which was developed especially for the needs in micro-fluidic total analysis systems (/spl mu/TAS). As this pump is of simple structure, and because it can be manufactured with planar production methods, it is both technically and economically feasible to integrate it as a one-way product into the manufacturing process of micro-fluidic analysis systems. The valves do not have any moving parts, and because of that, they are tolerant to particles in the pumped fluid. This makes them very well suited for the transport of particle-loaded fluids like blood samples. By modifying the valve layout, the pumping rates may be varied between 34 /spl mu/l/min and 55 /spl mu/l/min. In a slightly different valve layout featuring flexibly moving flaps the pumping rate can be increased up to 105 /spl mu/l/min. The counter-pressures achievable are in the range of 892 Pa to 1353 Pa, or ( in the version with flexibly movable sections) up to 3806 Pa.