Optimal design of piezoelectric cantilever for a micro power generator with microbubble

We propose a design method of piezoelectric cantilever to acquire maximum power from a micro power generation system, whose cantilever is pushed upward by microbubble and the deflected piezoelectric layer generates electric charges. We optimize geometric parameters for the maximum energy density by theoretical analysis. The optimal shapes are long and slender ones for thick film cantilevers and short and wide ones for thin film ones. We fabricated thick film cantilever and set up the experimental system.