A low-voltage electrostatically actuated MEMS scanner for in vivo biomedical imaging

With the inherent advantages of micromachining technologies such as small size, small mass, low cost, low power consumption and high reliability, there will be radical changes to biomedical devices and how clinical diagnoses are made. One of the most promising applications of microtechnologies is in the biomedical field. This paper presents a low-voltage high-torque MEMS 2D scanner well suited for in vivo biomedical imaging.