Electrostatic stabilization of thermal variation in quality factor using anchor loss modulation

We report an ultra-low energy dissipation silicon MEMS tuning fork resonator with a Q-factor of over 2 million at 570 Hz, with the ability of Q-factor stabilization throughout a temperature range of over 100 °C. This stabilization approach relies on the controlling of energy dissipation through regulating the stiffness misbalance of the tuning fork resonator. Without Q-factor regulation, the resonator demonstrates a Q-factor with a 25% drift from 2.14 million to 2.67 million, over a temperature range from −40 °C to +60 °C. With implementation of the proposed stabilization method, the experimental characterization reveals a stable Q-factor of 2.14 million within 0.3% (+1σ) variation for an identical temperature range (−40 °C to +60 °C).