Simulation, Microfabrication, and Control of a Microheater Array

This paper describes the simulation, fabrication, and feedback control of a microheater array designed for the implementation of real-time control during thermal evolution of microstructure. The ten-channel heating array was designed through finite element simulation and microfabricated to be compatible with in situ imaging in a scanning electron microscope. Control algorithms are implemented that demonstrate cooperative control of the temperature (using calibrated Ti heater line resistances as a proxy) across the set of channels in the array. The goal of this system is to be able to generate controlled thermal, and thus microstructural, and property distribution during processing of polycrystalline materials.