The effect of process parameters and annealing on the properties of Ti/Pt films for miniature temperature sensors

We present a Pt film temperature element of the size of 1.5×1.5 mm
²
with the meander width of 20 μm. It was investigated the effect of Pt film thickness prepared on alumina ceramics and the post-deposition annealing process on structural and electrical properties. As-deposited Pt films are polycrystalline with strongly preferred orientation on the (111) plane and the grains size is about 20 nm. The peak strength of (111) increased after annealing for all investigated samples and also the grain sizes increased up to 67 nm. Annealed Pt films exhibit a lower resistivity in comparison with the as-deposited films.