New approach for a multi-cantilever arrays sensor system with advanced MOEMS readout

Currently available sensor systems relying on multi-cantilever deflection detection by optical means are generally limited in their functionality by complexity and cost. Several laser sources as well as big sized detectors are needed to record the signal from each cantilever separately. In the frame of the ENIAC Joint Undertaking project Lab4MEMS II our group is currently developing a novel device capable of sensing large cantilever arrays using only a single laser source and a small sized position sensitive detector (PSD). The device is a closely packed highly integrated Micro-Opto-Electro-Mechanical-System (MOEMS) featuring dedicated optics, electronics and software combined with a micro-mirror. The system is being developed to become a lightweight and compact portable device, capable of determining measurement positions across the cantilever array providing self-adjustment automatically. The flexibility of the system makes it interesting for use in several fields ranging from research to industrial application. In this paper we show a general sensor system overview and examples of representative results of measurements performed on multi-cantilever arrays in which several vibrational modes are recorded for each cantilever.