Micro-lens antenna integrated in a silicon micromachined receiver at 1.9 THz

This article presents the latest developments of our work related to a micro-lens antenna integrated in a heterodyne receiver using silicon micromachining technology at Terahertz frequencies. The antenna is composed of a waveguide feed which uses a leaky wave cavity to enhance the directivity and illuminate a shallow lens efficiently. The receiver is a dual-polarized balanced heterodyne detector using hot-electron bolometers (HEB) as mixers. The front-end receiver, including the antenna, can be fabricated using silicon micromachining processes and has seamless integration, which reduces the overall size and losses.