Rib Microring Resonators in Lithium Niobate on Insulator

Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO
₃
) bonded to 1.8
$\mu \text{m}$
of SiO
₂
and an LiNbO
₃
substrate. Measurement results show a
$Q$
-factor of 2800 as well as a modulation depth of 18.7 dB.