High-resolution interdigitated back contact solar cell inspection using Terahertz microprobes

Terahertz (THz) near-field microscopy is presented as a new characterization tool for photovoltaic applications: High-resolution sheet resistance measurements at interdigitated back-contact (IBC) solar cell samples are conducted, revealing previously undetectable features with lateral dimensions as small as a few tens of μm. Despite the very high maximum resolution the method is reasonably fast and suited for full wafer-scale inspection tasks.