Microelectromechancial Systems (MEMS) At The UCLA Micromanufacturing Lab

Less than ten years after the first successful demonstration of micromotor (1). microelectromechanical systems (MEMS) is one of the fastest growing, most visible fields in engineering. To take the current momentum to a higher level and pass the torch to the next millennium, we should understand the engineering in microscale and adapt to the new paradigm in design and manufacturing.