Electrostatic control and its analysis of roller transferring processes in FPD manufacturing

In recent years, the structure of a-Si based TFTs have been getting more complex and glass transferring by conveyor rollers during each process were increased accordingly. Static electricity in transferring processes is becoming a major issue because most companies to pursue high productivity. In this paper, we analyzed a point defect which was induced by electrostatic discharge event in transferring processes. Based on the analysis, we proposed the effect of ionization to minimize triboelectric charge in glass transferring systems.