Design and characteristics comparison of MicroCantilever for integrated sensing applications

Emergence of Microelectromechanical Systems (MEMS) in the last decade has been tremendous and ever-growing. Microcantilever belong to MEMS class of devices and is truly the simplest structure. Merits for employing microcantilevers as sensing mechanism far outnumber the conventional senors. Sensing applications of Microcantilevers is widespread and explored. This work is dedicated to finite element (FE) 3D structural modeling of various micromechanical sensors. All cantilever design are made of silicon, poly and gold. ANSYS 13.0 gives 3D models which are close to reality mathematical models. It gives us stresses, strain and deflections for further analysis with a greater degree of accuracy. Micromechanical sensors made up of different materials have been explored. Characteristics improvement has been observed as a result of comparison.