Copper oxidation study by TEM

This paper studies copper oxidation using Transmission Electron Microscopy (TEM) on copper leadframe which was subjected to heat treatment process at 60°C, 120°C, 150°C, 180°C and 210°C for 0.5 hour. The TEM lamella was prepared by in-situ lift-out technique using Focused Ion Beam (FIB) followed by TEM inspection to reveal the microstructure of copper oxide. Additionally, Electron Energy Loss Spectroscopy (EELS) analysis was carried out on the copper leadframe sample that was baked at 210°C to determine the oxidation state of copper oxide.