32kHz MEMS-based oscillator for implantable medical devices

A MEMS based high stability 32kHz oscillator for real time clock (RTC) for medical device application using 0.13μm CMOS technology is designed and simulated. This oscillator achieves a power consumption of less than 1μA with 10pF load capacitor, and a functional temperature drift of ± 80ppm with temperature range from -20°C to 60°C.