Double regulated voltage supply for high precision MEMS accelerometers

This work presents the power management block using a double regulated voltage supply design in order to meet the stringent requirement for high precision MEMS accelerometers ASIC. The architecture employs two stages of supply regulation using two bandgap circuits and two voltage regulators to achieve high PSRR (>;100dB) and high line regulation (10μV/V) which are required for the ASIC to achieve high linearity and high dynamic range. The design is implemented in 6M1P TowerSemi 0.18μm CMOS process.