High voltage electrostatic driving of MEMS micromirrors

High Voltage pulses are required to actuate the MEMS for obtaining the desired performance. Charge pump based circuits are used for obtaining the required high-voltage conversion. However, many such stages need to be connected in series for achieving the required voltage gain. Thus, a two-stage boost converter is used to achieve 3.3V to 80V conversion. The PWM controllers are designed in 0.18 μm CMOS process. The pair of nMOS are used to generate the required MEMS actuation pulses.