Single-walled carbon nanotue pirani vacuum gauge

This paper presents the design, fabrication and synthesis of a carbon nanotube Pirani vacuum gauge which comprises 5-μm-long SWNTs as heater and Au/W as electrodes. Results show that the TCR of SWNTs is negative and about -0.004/°C. SWNTs Pirani vacuum gauge was demonstrated with a dynamic range of 2500Pa to 40Pa in air environment. The average sensitivity of SWNTs Pirani vacuum gauge is about 914Ω/Pa and the power consumption is lower than10μW.