Section 7: Other Actuators

This chapter contains sections titled:

• Micromechanical Silicon Actuators Based on Thermal Expansion Effects

• CMOS Electrothermal Microactuators

• Electrically-Activated, Micromachined Diaphragm Valves

• Study on Micro Engines��-��Miniaturizing Stirling Engines for Actuators and Heatpumps

• A Micro Rotary Actuator Using Shape Memory Alloys

• Millimeter Size Joint Actuator Using Shape Memory Alloy

• Reversible SMA Actuator for Micron Sized Robot

• Characteristics of Thin-Wire Shape Memory Actuators

• Shape Memory Alloy Microactuators

• Micro Actuators Using Recoil of an Ejected Mass

• Precise Positioning Mechanism Utilizing Rapid Deformations of Piezoelectric Elements

• Tiny Silent Linear Cybernetic Actuator Driven by Piezoelectric Device With Electromagnetic Clamp

• Experimental Model and IC-Process Design of a Nanometer Linear Piezoelectric Stepper Motor

• Zinc-Oxide Thin Films for Integrated-Sensor Applications

• A Micromachined Manipulator for Submicron Positioning of Optical Fibers

• Ultrasonic Micromotors: Physics and Applications