Oxide and Interface Trapped Charges, Oxide Thickness

This chapter contains sections titled:

• Introduction

• Fixed, Oxide Trapped, and Mobile Oxide Charge

• Interface Trapped Charge

• Oxide Thickness

• Strengths and Weaknesses

• Appendix 6.1 Capacitance Measurement Techniques

• Appendix 6.2 Effect of Chuck Capacitance and Leakage Current

• References

• Problems

• Review Questions